DEVICE FOR EVALUATING X-RAY OPTICAL ELEMENT

摘要

PURPOSE:To enhance the efficiency of utilizing the X-ray from an X-ray generator by converting the X-ray from an X-ray projecting means to parallel X-rays or condensing the same to one point. CONSTITUTION:The diagonal incident angle beta of the X-ray 4 to a 2nd mirror 22 is set at a prescribed angle by a 1st goniomter 25. Laser light 11 is then condensed to a generation point 19 of a target 14. The X-ray 1 enters a 1st mirror 20 at the diagonal incident angle theta. As a result, the scattered incident X-ray becomes the parallel X-rays which enter the mirror 2 at the diagonal incident angle beta. The X-rays 4 are converted by the mirror 22 to a monochromatic X-ray 7. The X-ray 7 enters a sample W at the diagonal incident angle gammaand is then reflected to come the X-ray 9 which enters a detector 29. The electric signal having the voltage corresponding to the intensity of the X-ray 9 is outputted from the detector 29 to an evaluation deciding part 31. The diagonal incident angle gamma is successively changed by operating the 2nd goniometer 27 and the measuring process is repeated, by which the intensity of the X-ray 9 is stored in the deciding part 31.