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发明名称
MANUFACTURE OF SEMICONDUCTOR ACCELERATION SENSOR
摘要
申请公布号
JPH01301181(A)
申请公布日期
1989.12.05
申请号
JP19880133083
申请日期
1988.05.30
申请人
MITSUBISHI ELECTRIC CORP
发明人
TSUGAI MASAHIRO;BESSHO MIKIO
分类号
G01P15/12
主分类号
G01P15/12
代理机构
代理人
主权项
地址
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