发明名称 |
Control and detection circuitry for mass airflow sensors |
摘要 |
A mass airflow sensor is disclosed which uses a small, thin dielectric diaphragm providing good thermal isolation for thin-film heating and temperature sensing elements, resulting in high flow sensitivity and low current operation of the heating element. The dielectric diaphragm is bounded by a p-etch-stopped silicon rim. The mass airflow sensor includes a primary sensor circuit which maintains a heated primary temperature sensing element and an ambient air temperature sensing element at a constant temperature difference. A slave sensor circuit, which includes a plurality temperature sensing elements, monitors heat loss due to airflow at a particular location on the diaphragm and generates an output signal indicative of airflow which is independent of ambient air temperature. |
申请公布号 |
US4884443(A) |
申请公布日期 |
1989.12.05 |
申请号 |
US19870137220 |
申请日期 |
1987.12.23 |
申请人 |
SIEMENS-BENDIX AUTOMOTIVE ELECTRONICS L. P. |
发明人 |
LEE, KI W.;COOK JR., CHARLES R. |
分类号 |
G01F1/68;B31B1/14;B31B1/64;B31B19/64;B31B27/00;B31B27/14;B65B43/12;B81B3/00;G01F1/684;G01F1/692;G01F1/696;G01F1/698;G01F15/04 |
主分类号 |
G01F1/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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