SWEPT APERTURE FLYING SPOT PROFILER

摘要

SWEPT APERTURE FLYING SPOT PROFILER A flying spot system uses a laser beam scanned in X and Y directions to provide surface profile information. The beam is applied to a surface under test and the time interval between the beginning of the sweep and the appearance of the beam image through an aperture is determined. This time interval is indicative of the beam angle which, through optical triangulation, is used to determine the surface height. A scan-descan arrangement and a plate with a small aperture are used to isolate a light detector from background light.