| 摘要 |
PURPOSE:To shorten a measurement time by memorizing a starting point and an end point of scanning in the (x) direction as the functions of the (y) coordinate value for enabling the scanning measuring surface to be limited. CONSTITUTION:Having an appropriate point A on the periphery of a sample as a starting point while seeing an eyepiece L, a stage T is moved with a joystick J so that the point A may come to the center of a visual field of a microscope for making the (x), (y) coordinates of the stage T to be memorized. Later, the line F is followed up to the point B so that a point on the chain line F encircling the sample may come to the center of the visual field for making a CPU to memorize the (x), (y) coordinates of the point on the line F. The CPU reconstructs the curve F with piecearise linear curve from the coordinate data of the point on a closed curved F to find the maximum and minimum value of the (y) coordinate in the range of scanning and the interval is divided by the prescribed number of scanning to decide a (y) coordinate of each scanning line, while calculating an (x) coordinate of the intersection with the line F every scanning line from the data of the reconstructed line F for being stored by a memory (m) 1 together with the (y) coordinate data of each scanning line having this as the scanning starting and end points. The stage T is moved in the (y) direction from the (y) coordinate of the scanning line for being moved to the (x) direction from the corresponding (x) coordinate in order to perform analytic operation. In this way, a measuring time can be shortened. |
