| 摘要 |
PURPOSE:To obtain the title sintered body having high density and high thermal conductivity by specifying the content of Fe, Co, Ni, V, Nb Or Ta incorporated in the aluminum nitride sintered body, the mean particle diameter and thermal conductivity thereof. CONSTITUTION:An aluminum nitride sintered body incorporates 0.01-1.0wt.% at least one kind of element selected from among Fe, Co, Ni, V, Nb and Ta and has both <=5mum mean particle diameter and >=100w/mK thermal conductivity. The above-mentioned aluminum nitride sintered body is obtained by adding a small quantity of Fe, Co, Ni, V, Nb and Ta to high-purity aluminum nitride powder and thereafter heating and sintering the mixture at 1700-2100 deg.C in the nonoxidative atmosphere contg. nitrogen. Aluminum nitride which is high purity and fine particle is preferably utilized as a raw material. For example, aluminum nitride powder having <=500ppm content of metallic impurities, 1.0wt.% oxygen content and about 4.0m<2>/g specific surface area is favorable. |
