发明名称 ALIGNER
摘要 PURPOSE:To extremely easily set optimum exposure conditions by longitudinally dividing a slit light into a plurality of blocks, producing the illuminances of the respective blocks as electric amounts of the respective blocks, and controlling slit opening width varying means disposed at positions corresponding to the blocks in response to the electricity amounts. CONSTITUTION:Many sensors 36, optoelectric transducers, are disposed with regularity in a sensor array 21. The sensors 36 are disposed in an array state on a whole surface in which lights passed through slits 19 are radiated. The array 21 is divided in rows into n pieces of blocks, and signals corresponding to illuminances S1-Sn are transmitted from the blocks to a slit controller 35. The controller 35 receives the signals S1-Sn, processes the signals, transmits them to drive control signals Q1-Qn to an actuator 32 so that the illuminance distribution of slit lights 37 becomes uniform, and partly alters an elastic unit 31a in the opening widths D of the slits 19. Thus, a region in which the light passes a slit 30 can be corrected.
申请公布号 JPH01298719(A) 申请公布日期 1989.12.01
申请号 JP19880128350 申请日期 1988.05.27
申请人 HITACHI LTD;HITACHI HOKKAI SEMICONDUCTOR LTD 发明人 HIRAI MUTSUO
分类号 G03F7/20;H01L21/027;H01L21/30;(IPC1-7):H01L21/30 主分类号 G03F7/20
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