| 摘要 |
<p>PURPOSE:To smoothly accommodate and discharge a wafer by rocking a wafer accommodating box having accommodating grooves through a support member. CONSTITUTION:A cassette 1 of an accommodating box including therein accommodating grooves into which a wafer 15 is inserted, is supported on a carrier stage 2 by first and second cams 5, 6 provided on an elevatable stage 3 of a cassette discharge part and three support members of a ball joint 4 of the cassette 1. The cassette 1 is rocked through the cams 5, 6 to substantially widen the width of the groove 14, for smooth discharge of the wafer and further for smooth accommodation of the wafer.</p> |
