| 摘要 |
<p>PURPOSE:To make improvements in sealing workability and miniaturization performable by installing the non-brazing plane made step-different from a first brazing plane, sealing a cathode support rod, and a second brazing plane, sealing an opening end at the side of a vacuum vessel, while forming each of both these brazing planes into a flat surface of almost the same height. CONSTITUTION:A cathode insulator 14 is provided with cathode support rods 10 and 10 being inserted into a pair of insert holes 19 and 19. A first sealing metal 15 seals these support rods 10 and 10, and a second sealing metal 16 seals an opening end of a vacuum vessel together with the insulator 14. These sealing metals 15 and 16 are brazed on the same surface at the side of a vacuum vessel of the insulator 14. First brazing planes 17 and 17 are formed in a peripheral edge of the paired insert holes 19 and 19 of the support rods 10 and 10 on a surface at the side of the vacuum vessel of the insulator 14, and a second brazing plane 18 is formed in an outer peripheral edge of the surface of the insulator 14. A non-brazing plane 21 is formed on the surface of the insulator 14 other than these brazing planes 17, 17 and 18, and it is made step-different from these brazing planes 17, 17 and 18. And, these brazing planes 17 and 17 and the brazing planes 18 is formed into each flat surface of almost the same height, and a metalized layer is formed on the surface. Thus, sealing workability is improvable and simultaneously high resisting pressure is secured, thus miniaturization is attainable.</p> |
