发明名称 PROTON ENERGY DISPERSION MEASUREMENT FOR SURFACE ANALYZER AND DEVICE THEREOF
摘要 PURPOSE:To correctly determine the dispersion of the proton beam energy inherent in a device by reversing the proton beam fed to a magnet chamber from an ion source and again feeding it to a position detector through an accelerating/decelerating pipe via magnets. CONSTITUTION:Protons are generated by an ion source and deflected by a magnet 2. The protons are accelerated by an accelerating/decelerating pipe 3 and pass a Q lens 7. A ultra-vacuum magnet chamber 13 is connected beyond it in place of a ultra-vacuum chamber 8. The chamber 13 reverses incident protons with no energy loss. Reversing magnets 11 and 12 are installed for this purpose. The magnets 11 and 12 bend the orbits of protons to follow the locus AGCDEFA and reverse the motion direction by 180 deg.. Directions of magnetic fields of the magnets 11 and 12 are perpendicular to the paper face but opposite in direction. This chamber 13 is temporarily connected to the tip of a vacuum system in place of the ultra-vacuum chamber 8 to investigate the energy dispersion of protons.
申请公布号 JPH01296559(A) 申请公布日期 1989.11.29
申请号 JP19880126814 申请日期 1988.05.24
申请人 NISSIN ELECTRIC CO LTD 发明人 AOKI MASAHIKO
分类号 G01N23/22;H01J49/44 主分类号 G01N23/22
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