发明名称 |
Manufacturing electronic devices. |
摘要 |
<p>The invention provides a process for manufacturing an electronic device on a semiconducting substrate (10) which is transparent to light of a particular wavelength. The process includes the steps of treating the substrate to form at least one region (S,D) having a different electrical property to the substrate, and defining a conducting contact (18) for the regionn by selective photolithographic masking and chemical etching. A layer of photoresist material (16) deposited on one side of the substrate is subjected to light transmitted through the substrate from a light source on the other side of the substrate. The process can be used to produce a field effect transistor on a diamond substrate.</p> |
申请公布号 |
EP0343962(A2) |
申请公布日期 |
1989.11.29 |
申请号 |
EP19890305258 |
申请日期 |
1989.05.24 |
申请人 |
DE BEERS INDUSTRIAL DIAMOND DIVISION (PROPRIETARY) LIMITED |
发明人 |
JONES, BARBARA LYNN |
分类号 |
H01L21/027;H01L21/04;H01L29/16 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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