,申请号JP19880064826U-传众专利搜索

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发明名称
摘要
申请公布号	JPH01169028(U)	申请公布日期	1989.11.29
申请号	JP19880064826U	申请日期	1988.05.17
申请人		发明人
分类号	C23C16/50;H01L21/285;H01L21/31;(IPC1-7):H01L21/31	主分类号	C23C16/50
代理机构		代理人
主权项
地址

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