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发明名称
CHARGED PARTICLE OPTICAL SYSTEM
摘要
申请公布号
JPH01296549(A)
申请公布日期
1989.11.29
申请号
JP19880125717
申请日期
1988.05.25
申请人
HITACHI LTD
发明人
KURODA KATSUHIRO
分类号
H01J37/141;H01J37/21
主分类号
H01J37/141
代理机构
代理人
主权项
地址
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