| 摘要 |
<p>PURPOSE:To simplify an alignment mechanism, by mounting the first feed mechanism for feeding out a semiconductor element to a stage, an alignment mechanism for calculating the center position of a wafer and the second feed mechanism for moving the wafer to the center. CONSTITUTION:A wafer 2 is fed out to the first predetermined stage 8 from a supply magazine by the first feed mechanism and the center position thereof is calculated by an alignment mechanism consisting of a sub-chuck 9, a pincette 10 and a Z-stage 11. Further, the wafer 2 is placed on the hand part 42 provided on a handling arm 41 under vacuum and moved to the center of a mount stand by the second feed mechanism while the place aligned is stored. At this time, the second feed mechanism moves the wafer 2 while holds each aligned predetermined position. Therefore, it is unnecessary to perform conventional alignment calculating the center of the wafer 2 placed on the mount stand while a time is taken at every semiconductor element and a large-scale alignment apparatus such as a height sensor or a monitor camera becomes unnecessary and an alignment mechanism can be simplified.</p> |
