| 摘要 |
PURPOSE:To enable the relationship between a force and displacement to be precisely controlled by unifying a mechanism for detecting component of multiple shaft forces and a mechanism for generating multi-dimensional displacement. CONSTITUTION:When any external force acts on a force transmitting body 18, a diaphragm 20 of a strain generating body 14 is subjected to mechanical deformation by which stress is generated in a single crystal substrate 21 to vary resistance in a detecting element 23 on a detecting surface 22 under the effect of the stress according to a piezo resistance effect. Thus, potential is generated in each bridge circuit and the component of force is detected as an electric signal which is sent from a bonding wire 25 to the external circuit through a lead pin 26 to be processed as a displacement generating signal for generating the displacement in a piezo electrode 27. This signal is sent to the piezo electrode 27 to deform a piezo element. Thus, a force action displacement section 19 is displaced through the diaphragm 20 and force transmitting body 18. |
