发明名称 Process for the preparation of polycrystalline diamond.
摘要 A process for the preparation of continuous polycrystalline diamond, especially diamond films, which comprises applying to a substrate diamond powder in an amount of from about one particle per ten square microns to about 10 particles per square micron with an average particle diameter of from about 0.1 to about 1.0 micron (more especially from about 0.1 to about 0.4 micron); heating the resulting powdered substrate subsequent to incorporation in a processing apparatus; introducing a mixture of gases into the chamber, which gases provide a supply of carbon and hydrogen; and decomposing the gas mixture.
申请公布号 EP0343846(A2) 申请公布日期 1989.11.29
申请号 EP19890305015 申请日期 1989.05.18
申请人 XEROX CORPORATION 发明人 JANSEN, FRANK;MACHONKIN, MARY ANN
分类号 C30B29/04;C23C16/02;C23C16/27;C30B25/02;H01L21/48 主分类号 C30B29/04
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