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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01295438(A)
申请公布日期
1989.11.29
申请号
JP19880126402
申请日期
1988.05.24
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
YAMAMOTO SHINICHI;NAKAO ICHIRO
分类号
H01L21/76;H01L21/31
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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