| 发明名称 |
Method of making a multidimensional quantum-well array |
| 摘要 |
Multidimensional quantum-well arrays are made by electron-beam lithographic patterning, followed by solid-state diffusion.
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| 申请公布号 |
US4883769(A) |
申请公布日期 |
1989.11.28 |
| 申请号 |
US19880234069 |
申请日期 |
1988.08.18 |
| 申请人 |
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE ARMY |
发明人 |
AU COIN, THOMAS R.;BRADDOCK IV, WALTER D.;IAFRATE, GERALD J. |
| 分类号 |
H01L21/027;H01L21/8252;H01L29/12;(IPC1-7):H01L21/20;H01L21/225 |
主分类号 |
H01L21/027 |
| 代理机构 |
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