| 摘要 |
PURPOSE:To readily and efficiently obtain a peelable carbonaceous film excellent in chemical stability, electric conductivity and toughness on an apparatus wall of a reactor by thermally decomposing an oxygen atom-containing hydrocarbon compound or a mixture thereof with another hydrocarbon compound without containing oxygen atom in an inert atmosphere in a reactor. CONSTITUTION:An oxygen atom-containing hydrocarbon compound or a mixture thereof with another hydrocarbon compound without containing oxygen atom is thermally decomposed in an inert atmosphere by a chemical vapor deposition method to grow a peelable carbonaceous film on an apparatus wall of a reactor. Acyclic aliphatic, cycloaliphatic, aromatic hydrocarbons, etc., are used as the oxygen atom-containing hydrocarbon compound and hydrocarbon compounds containing oxygen atom in the molecule are cited. For example, aromatic hydrocarbon compounds, such as phenolic, bisphenolic, aromatic ring-containing alcoholic and aromatic ring-containing furan-based hydrocarbon compounds, are preferred. |
