| 摘要 |
PURPOSE:To obtain a dense thin film of zirconia stabilized with yttria fast stuck to a substrate, having high uniformity by coating the substrate with a slurry containing plural kinds of zirconia particles stabilized with yttria having limited particles diameters and a binder, drying and burning. CONSTITUTION:Zirconia particles stabilized with yttria, having 1-5mu particle diameter are blended with zirconia particles stabilized with yttria, having <=1mu particle diameters and two or groups of different diameters and a binder to form a slurry. Then the slurry is applied to a substrate, dried and burnt to give the aimed thin film. In this method, when the raw material particles having the above-mentioned particle diameters are blended and packed, the particles are made into a state wherein a small amount of the particles having <=1mu particle diameter are packed into gaps of a large amount of the particles having 1-5mu particle diameter. When the resulting particles are sintered, since the particles having <=1mu particle diameter are melted at a lower temperature than the particles having 1-5mu particle diameter and act like a binder, melting of mixed particles of raw materials is not required and sintering can be carried out at low temperature. |
