| 摘要 |
<p>PURPOSE: To widely use the internal space of a processing station by pivoting a manipulator on a cassette platform capable of moving along a vertical axis in the above apparatus for preventing particle contamination for a semiconductor processing unit. CONSTITUTION: A platform 12 of a first means 11 is positioned in the vicinity of a cassette port 8 of a port plate 9, a second means 13 is positioned below a longitudinal hole 10, and a cassette 5 is released at the cassette port 8. Thus, the cassette 5 is lowered and the platform 12 is lowered with the cassette 5 in the longitudinal hole 10. Secondly, an arm 16 is turned by a step motor 20, and an engagement means 19 is positioned on the cassette 5 to be held by the engagement means 19. The arm 16 is oscillated in the direction of separating from the longitudinal hole 10 to place the cassette 5 in a processing position 14. At this time, the platform 12 seals a container 7 interlocking with the above operation. By this arrangement, the processing space can be utilized widely.</p> |
