| 摘要 |
PURPOSE:To inspect leads of IC packages speedily by picking up images of one-side parts of two IC packages at the same time by using 45 deg. reflecting mirrors. CONSTITUTION:Two right-angled prisms 9 are set between measurement tables 10 and 11, and an A side 5 of an IC package 1 on the measurement table A10 and a B side 6 of an IC package on the measurement table 11 are picked up by an ITV camera 2 at the same time to inspect the two sides. Further, right- angled prisms 9 are set between measurement tables 12 and 13 and a C side 7 and a D side 8 of the IC packages are picked up similarly by the ITV camera 2 at the same time to inspect the two sides. The IC packages 1 are conveyed in the order of the measurement table A10, measurement table B11, a repeating table 14, and the measurement tables C12 and D13 without being changed in direction to inspect four sides. |
