METHOD AND APPARATUS FOR PROCESSING WITH PLASMA.,申请号EP19880903398-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR PROCESSING WITH PLASMA.
摘要
申请公布号	EP0311696(A4)	申请公布日期	1989.11.27
申请号	EP19880903398	申请日期	1988.04.25
申请人	NIPPON TELEGRAPH AND TELEPHONE CORPORATION	发明人	MATSUO, SEITARO;NISHIMURA, HIROSHI;KIUCHI, MIKIHO
分类号	H01L21/205;C23C16/511;H01J27/18;H01J37/32;H01L21/302;H01L21/3065;H05H1/46	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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