| 摘要 |
<p>PURPOSE:To set the position of a susceptor at film-forming time to a desired position accurately and easily by performing carrier control of the susceptor in a film-forming room by using chain type carrier mechanism outside the film-forming room. CONSTITUTION:When a carrier chain 5 is cyclically driven via a driving shaft 10 by a driving motor, a dog 6 of the chain 5 is engaged with the projection 3a of a susceptor 3 and the susceptor 3 is caused to move in a left direction. This movement is transmitted to a motor chain 20 geometrically reduced via a connection chain 16. By detecting the position of a dog position display plate 18 mounted at a position corresponding to the dog 6 in the film-forming room 1, the position of the susceptor 3 in the film-forming room 1 is monitored. A number of photoelectric switches 8 are positioned along the chain 20. As a result, the position of the susceptor 3 at film-forming time is set to a desired position accurately and easily.</p> |
