发明名称 SEMICONDUCTOR MEMORY DEVICE
摘要 PURPOSE:To easily find out a memory cell by a method wherein a width of parts which are parts of lines of a gate electrode, where the memory cell is not formed and which are used as wiring parts is made a width which is different from that of other parts at intervals of definite numbers of the lines of the gate electrode. CONSTITUTION:A memory cell is not formed under a source line 21; parts of word lines 10 which overlap with the source line 21 are used only as wiring parts. A width of the parts used as the wiring parts of the word lines 10 is made wider at intervals of prescribed numbers of the word lines 10; wide-width parts 11 are formed. The wide-width parts 11 used as marks are formed at definite intervals in the central parts of a memory array region; accordingly, even when the number of memory cells is increased, it is possible to immediately and accurately find out a memory cell situated near the center.
申请公布号 JPH01293656(A) 申请公布日期 1989.11.27
申请号 JP19880126132 申请日期 1988.05.23
申请人 MITSUBISHI ELECTRIC CORP 发明人 YAMAMOTO MAKOTO;ANDO NOBUAKI
分类号 G11C11/401;H01L21/3205;H01L23/52;H01L27/10;H01L27/108 主分类号 G11C11/401
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