| 发明名称 |
Device for heat transmission under vacuum with grains. |
| 摘要 |
<p>A device for heat transmission between a heat source (12) and an object (21) in a vacuum chamber (1) is made by interposing in a cavity, which is delimited by a thermal emission wall (20) and the object (21), a granular material (30) which adapts to the thermal expansion while permitting heating by conductivity in very good conditions.
<??>Possible application to the manufacture of semi-conductors and to the crystallisation of thin layers.
<IMAGE>
</p> |
| 申请公布号 |
EP0343072(A1) |
申请公布日期 |
1989.11.23 |
| 申请号 |
EP19890401369 |
申请日期 |
1989.05.18 |
| 申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE |
发明人 |
BECHEVET, BERNARD;CALVAT, CLAUDE;ROLLAND, BERNARD;VALON, BRUNO |
| 分类号 |
H01L39/24;B01J3/00;C23C14/22;C23C14/24;C30B25/10;F27B5/04;F27B17/00;F27D99/00;H01L21/00;H01L21/203;H05B3/60;H05K7/20 |
主分类号 |
H01L39/24 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
