发明名称 |
A container for an integrated circuit wafer and method for preparing the same. |
摘要 |
<p>The present invention relates to a container for an integrated circuit wafer comprising a tray-shaped member having a recess and a complimentary sheet member sized to attach to and cover said recess, at least one of said members being made from a material selected from the group consisting of a single layer of a high nitrile resin, and a laminated layer of a high nitrile resin, a polyvinylidene chloride resin, an ethylene vinyl alcohol copolymer or a polyvinyl alcohol resin, and a method for storing the wafer.</p> |
申请公布号 |
EP0342930(A2) |
申请公布日期 |
1989.11.23 |
申请号 |
EP19890304943 |
申请日期 |
1989.05.16 |
申请人 |
MITSUI TOATSU CHEMICALS, INC. |
发明人 |
MAKIHARA, MASAYUKI A-41 MITSUI TOATSU SHATAKU;RYUNO, TOSHIROU;FUJITA, MITSUNOBU;NARIMATSU, OSAMU;KONISHI, YOSHIYUKI |
分类号 |
B32B27/08;B65D85/86;H01L21/673 |
主分类号 |
B32B27/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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