发明名称 Surface cleaning method with a transported plasma.
摘要 <p>The invention consists in subjecting the object (10) to be cleaned to the action of a transported cold plasma, by placing it in the expansion chamber (7) of an installation producing a cold plasma, for example under the action of a microwave discharge. The plasma-forming gas is preferably a mixture of nitrogen and oxygen containing a small proportion of a fluorinated or chlorinated compound, in particular nitrogen trifluoride. The invention applies to the cleaning of objects made from stainless steel, ceramic, porcelain, or glass by destroying their polluting substances, for example mechanical oils or greases. It applies, in particular, to the decontamination of tools used in the nuclear industry. &lt;IMAGE&gt;</p>
申请公布号 EP0343038(A1) 申请公布日期 1989.11.23
申请号 EP19890401297 申请日期 1989.05.10
申请人 SOCIETE DE PRESTATIONS DE SERVICES, S.P.S. 发明人 DESSAUX, ODILE;MUTEL, BRIGITTE;SZURMINSKI, DANIEL
分类号 B08B5/02;B08B7/00;C23G5/00;H01L21/302;H01L21/304;H01L21/3065 主分类号 B08B5/02
代理机构 代理人
主权项
地址