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发明名称
VERFAHREN ZUR STEUERUNG DER IONENDICHTE UND IONENENERGIE BEI DER PLASMAGESTUETZTEN SUBSTRATBEARBEITUNG
摘要
申请公布号
DD273649(A1)
申请公布日期
1989.11.22
申请号
DD19880317521
申请日期
1988.07.04
申请人
VEB ELEKTROMAT DRESDEN,DD
发明人
FROMM,BURKHARD,DD;MENZEL,SIEGFRIED,DD;KUSKE,JUERGEN,DD;HAIDUK,ACHIM,DD
分类号
C23C14/54;(IPC1-7):C23C14/54
主分类号
C23C14/54
代理机构
代理人
主权项
地址
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