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发明名称
MEASURING METHOD FOR ADHESION OF THIN FILM
摘要
申请公布号
JPH01291144(A)
申请公布日期
1989.11.22
申请号
JP19880121064
申请日期
1988.05.18
申请人
SANYO ELECTRIC CO LTD
发明人
KONDO TAKEO
分类号
G01N19/04;H01L21/66
主分类号
G01N19/04
代理机构
代理人
主权项
地址
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