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发明名称
PROBE CARD AND PROBE DEVICE
摘要
申请公布号
JPH01288771(A)
申请公布日期
1989.11.21
申请号
JP19880118949
申请日期
1988.05.16
申请人
SUMITOMO ELECTRIC IND LTD
发明人
KISHIBE SADAJI
分类号
G01R1/073;G01R31/28;H01L21/66
主分类号
G01R1/073
代理机构
代理人
主权项
地址
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