发明名称 DUST DISPERSION PREVENTING MECHANISM OF LINEAR MOTION MECHANISM
摘要 <p>PURPOSE:To prevent scatter of dust effectively by furnishing an eaves which is pressed by motion of a slider to shut the air directed upward, installing a fan which sends the air in a casing in the direction opposite to the motion of the slider to decrease the difference of air pressure on both sides of the slider, and arranging an air pump for exhaustion of the air from the casing. CONSTITUTION:That portion of the air pressed by a slider 4 which is directed upward is shut by eaves 10a, 10b in the upper part of the slider 4 to be directed ahead, and then falls to be attracted into exhaust holes 7a, 7b. In the direction opposite to the motion of the slider 4 the air is sent forcedly by a fan 11 installed in the lower part of the slider 4 to lower the pressure difference of the airs on both side of the slider 4 to a great extent, which together with forced exhaust from the exhaust holes 7a, 7b on both sides of an air pump 9, eliminates the portion directed upward. This prevents the air, i.e. dust, from scattering upward from a gap in a cover 2b on the oversurface of a casing 2.</p>
申请公布号 JPH01289685(A) 申请公布日期 1989.11.21
申请号 JP19880113078 申请日期 1988.05.10
申请人 HITACHI ELECTRON ENG CO LTD 发明人 MORI KYOICHI
分类号 B25J5/02;B25J9/02;B25J19/00;H01L21/677 主分类号 B25J5/02
代理机构 代理人
主权项
地址