| 摘要 |
<p>PURPOSE:To enable highly accurate detection of a flow rate, by arranging flow rate detectors comprising a thin film resistance material having an opening to cover all passages orthogonal to the direction of the flow of a fluid. CONSTITUTION:An insulation thin film 6 and a metal thin film 7 are formed by evaporation on a metal foil 5 and a conductive paste 8 is applied on the thin film 7 at a specified interval to obtain a unit laminate body 50. The laminate body 50 thus obtained is laid in plurality and a metal foil strip electrode 9 is provided each on the thin film 7 of the laminate body 50 in the uppermost and lowermost layers. A load is applied in the direction of the arrow P and a honeycomb-shaped flow rate detector 1a is obtained by drying and shaping. Then, a support 1b is inserted in the perimeter of the element 1a to build a flow rate sensor 1 and a temperature sensor 2 and the flow rate sensor 1 thus obtained are arrange orthogonal to the flow direction R of a fluid path 10 to make a fluid pass through a space part 1c of a cell. Thus, a current (i) is supplied to the thin film layer 7, thereby enabling the determining of a mass flow rate by an expression between a heating value Q transmitted to the fluid and the current (i).</p> |
