| 摘要 |
PURPOSE:To reduce a noise and to prevent an electrode from being damaged and a gas from being deteriorated by a method wherein a second capacitor and third capacitor are inserted in series in a discharge line of a first capacitor and a main discharge electrode and a three-terminal discharge electrode for preliminary discharge used are connected in parallel with them. CONSTITUTION:When a high-speed switch 8 is in an OFF position, an electric discharge is accumulated in a first capacitor 12 from a high-voltage power supply 9 and, when the high-speed switch 8 is in an ON position, the electric charge which has been accumulated in the first capacitor 12 is transferred to second and third capacitors 18, 31. Then, when a voltage on both ends of the third capacitor 31 reaches a firing voltage, a preliminary discharge is caused by an electric charge which has been supplied to a three-terminal discharge electrode 24 and a gas between main discharge electrodes 2, 3 is ionized. A voltage on both ends of the second capacitor 18 is increased and reaches the firing voltage after the delay time by a pulse delay element 30; a main discharge is caused between the main discharge electrodes 2, 3 and, a pulse laser beam is oscillated and output. By this setup, it is possible to obtain a pulse laser oscillation apparatus whose gas contamination and damage of a circuit component are small and noise is low. |
