发明名称 Method for photopatterning metallization via UV-laser ablation of the activator
摘要 A laser, such as an excimer laser, is employed to ablate electroless plating activator material from polymer and other substrates. The treated substrates are then immersed in electroless plating baths for plating of conductive material over remaining activator material. The method is particularly effective for depositing conductive patterns on non-flat substrates and on substrates needing plated-through connections. High resolution patterns are created on any compatible polymer substrate with any compatible electroless plating activator material.
申请公布号 US4882200(A) 申请公布日期 1989.11.21
申请号 US19880237638 申请日期 1988.08.23
申请人 GENERAL ELECTRIC COMPANY 发明人 LIU, YUNG S.;GRUBB, WILLARD T.
分类号 C23C18/16;G03F7/004;G03F7/20;H01L23/538;H05K3/18 主分类号 C23C18/16
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