| 摘要 |
PURPOSE:To prevent a conductor and a conductor layer from oxidizing at the time of baking in an oxidative atmosphere by composing the layer of copper in a low temperature sintered multilayer ceramic board, filling the hole of the ceramics with a surface side conductor to be connected to an electrode layer, and composing it of noble metal. CONSTITUTION:A ceramic body 1 is formed of crystallized glass body composed of at least one of silicon dioxide, aluminum oxide, etc., a conductor layer 2 is formed of three layers, formed in the body 1, and composed of copper. A conductor 3 is composed of an inner conductor 32 for connecting between the layers 2, and a surface side conductor 31 exposed from the body 1 at the side of an electrode layer 4 for connecting the layer 2 to the layer 4, an inner conductor 32 is formed of sole Cu or Cu-Pd, and the conductor 31 is formed of noble metals such as Pt, Pd-Au, etc. All the conductors 4 are filled substantially densely in the viahole 11 of the body 1 in a sealing structure. Thus, it can form the electrode layer and the resistance layer by baking while preventing the conductor layer or the like from oxidizing in an oxidative atmosphere. |
