| 摘要 |
PURPOSE:To prevent vacuum equipment from damaging at the time of sucking liquid by providing a vapor-liquid separating means which separates vapor and gas contained in exhaust gas in the exhaust path of a vacuum sucking means. CONSTITUTION:A vapor-liquid mixed flow sucked into an air pressure type vacuum device 28 is discharged from an exhaust port 27 to flow in a vapor- liquid separating device A 30 while liquid is vaporized when a little, but remains when much. The vapor-liquid mixed flow which flows in the vapor-liquid separating device A 30 is separated into the vapor and liquid; and the vapor is discharged and sent to a vapor-liquid separating device B 34 and the liquid is discharged from a liquid exhaust port B 32. The vapor discharged from the exhaust port A 31 flows in the vapor-liquid separating device B 34 and is separated into vapor and liquid together with a vapor flow from the exhaust pipe 24 of a lower cup 22; and the liquid is discharged from a liquid exhaust port B 35 and the vapor is processed by an alkali exhaustion processor 37. Consequently, even if liquid is sucked, it can be adsorbed without any trouble. |
