| 摘要 |
PURPOSE:To improve adhesive properties with a supporting board by forming a photodetecting region and an output terminal region in the state of a laminated layer structure of a transparent electrode film, a thin semiconductor film and a metal electrode film, and then irradiating the terminal region with an energy beam to electrically couple the transparent electrode film of this region to the metal electrode film. CONSTITUTION:A transparent electrode film 2 is formed on one main surface of a light transmissive supporting board 1 in the state of a body 2a and an island 2b. A thin semiconductor film 3 including a semiconductor optical active layer is formed on substantially whole one main surface of the board 1 including the film 2, and a metal electrode film 4 is formed on the upper surface thereof. The body 4a of a metal electrode film 4, the island 2b of the film 2 and the island 4b of the film 4, the body 2a of the film 2 are respectively electrically connected by radiating the film 4 with an energy beam LB on a first output terminal region 6 and a second output terminal region 7. Thus, the adhesive properties with the board can be improved. |
