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发明名称
ION BEAM NEUTRALIZING DEVICE
摘要
申请公布号
JPH01287922(A)
申请公布日期
1989.11.20
申请号
JP19880116929
申请日期
1988.05.16
申请人
MITSUBISHI ELECTRIC CORP
发明人
MATSUMURA YASUSHI
分类号
H01L21/203;B01J19/08
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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