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发明名称
INTEGRATED CIRCUIT
摘要
申请公布号
JPH01286323(A)
申请公布日期
1989.11.17
申请号
JP19880115888
申请日期
1988.05.11
申请人
NEC CORP
发明人
SAITO TATSUYA
分类号
G01R31/28;H01L21/66
主分类号
G01R31/28
代理机构
代理人
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地址
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