发明名称 CHARACTERISTICS RECOVERING METHOD FOR PHOTOELECTROMOTIVE FORCE DEVICE
摘要 PURPOSE:To enable desired characteristics to be obtained easily by selectively removing a short-circuit part between both electrodes so as to recover characteristics. CONSTITUTION:For a photoelectromotive force device, a first electrode consisting of SnO2, amorphous silicon semiconductor layer (optical semiconductor layer) consisting of amorphous silicon, and a second electrode consisting of metal such as, e.g., Al, Cr, Ag, etc., are formed on a substrate in this order. In this case, if a pin hole is formed in the optical semiconductor layer, at the time of second electrode formation, second electrode material passes through the pin hole and the second electrode and the first electrode becomes a short- circuit condition. In this case, to recover the characteristics, the second electrode material accumulated in the pin hole part is removed selectively. Hereby, the lowering of characteristics of the photoelectromotive force device by the short- circuit part can be prevented.
申请公布号 JPH01286371(A) 申请公布日期 1989.11.17
申请号 JP19880115746 申请日期 1988.05.11
申请人 KANEGAFUCHI CHEM IND CO LTD 发明人 MIZUGUCHI HISANORI;MIZUKAMI SEISHIRO;HASHIMOTO YOSHIHIKO;OOHAYASHI TADASHI
分类号 H01L31/04 主分类号 H01L31/04
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