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发明名称
METHOD FOR EPITAXIAL GROWTH OF GALLIUM ARSENIDE
摘要
申请公布号
JPH01286999(A)
申请公布日期
1989.11.17
申请号
JP19880116478
申请日期
1988.05.13
申请人
RIKAGAKU KENKYUSHO;NIPPON STEEL CORP
发明人
NANBA SUSUMU;MORIYA AKIHIRO;AOYANAGI KATSUNOBU;IIMURA YASUFUMI;NAGATA AKIRA
分类号
C30B23/08;C30B29/42;H01L21/203
主分类号
C30B23/08
代理机构
代理人
主权项
地址
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