| 摘要 |
PURPOSE:To stabilize a discharge by inserting a middle tube into a laser gas supply unit, assembling it with a cylindrical electrode and disposing it at the position not to exceed the cylindrical anode at the end of the middle tube. CONSTITUTION:A laser gas introduced by a T-shaped glass tube 21 is collided with a middle tube 22 of double tubular structure to generate a turbulent flow. Thus, the gas flows along the outside, and passes the cylindrical anode 23 into a laser tube 24. The tube 22 is filled in the tube 21 of the laser gas supply unit, and the laser gas speed distribution before entering the laser tube is accelerated at the tubular wall. Then, the laser gas becomes uniform speed distribution when it enters into the laser tube. Accordingly, a glow discharge in the laser tube fully prevails to the inside of the tube 23. The laser gas thus finished for the discharge is rapidly removed out of a resonator via an exit 26. |
