| 摘要 |
PURPOSE:To continuously and speedily obtain a series of still pictures and to efficiently execute a shape check by linking the plural still pictures,which are image-picked up with the timing of pulse emission from an illuminating device, and obtaining the picture information of a whole checked subject. CONSTITUTION:A control part 3 moves an XY table 2 to a check starting position and sends a check starting command to a picture processing unit 6A. An illuminating device 4A is pulse-emitted in each constant time by the picture processing unit 6A and the still picture is taken-in from an image pick-up device 5. Simultaneously, a position detecting device 7 takes-in position data on a substrate 1 of the still picture. On the basis of these data, the picture processing unit 6A links the still pictures in respective positions. This operation is successively repeated while the XY table 2 is moved at a constant speed up to a check ending position. Thus, a series of the still pictures can be continuously and speedily obtained and the shape check can be efficiently executed. |
