MEASURING INSTRUMENT FOR FLAT PASSAGE TYPE SEMICONDUCTOR DEVICE,申请号JP19880113948-传众专利搜索

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发明名称	MEASURING INSTRUMENT FOR FLAT PASSAGE TYPE SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH01284776(A)	申请公布日期	1989.11.16
申请号	JP19880113948	申请日期	1988.05.11
申请人	MATSUSHITA ELECTRON CORP	发明人	SATO YASUKUNI;URUMA KATSUNORI;SASAGAWA TAKAO;ISEGAME HIROSHI
分类号	G01R31/26	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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