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发明名称
MANUFACTURE OF COMPOUND SEMICONDUCTOR WAFER
摘要
申请公布号
JPH01283836(A)
申请公布日期
1989.11.15
申请号
JP19880113154
申请日期
1988.05.10
申请人
HITACHI CABLE LTD
发明人
TOYOSHIMA TOSHIYA;WAJIMA MINEO
分类号
H01L21/306;H01L21/304
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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