| 摘要 |
PURPOSE:To form an optical waveguide which is excellent in its boundary surface accuracy and small in its light scattering loss by irradiating locally a light to a chalcogen compound consisting of a specified ratio range of Se and Ga, and providing an optical refractive index difference between an irradiated part and a nonirradiated part. CONSTITUTION:A chalcogen compound thin film 1 having 65-97% Se and 3- 35% Ga by mol% is vapor-deposited and formed on a glass substrate 3. A p- xylylene film 2 is formed as a protective film on the film 1. A beam 4 whose wavelength is within 300-800mm. such as an He-Ne laser beam, etc. is irradiated to an optional minute area from the film 2 side by use of a condensing lens 5, and an irradiated area 6 is crystallized and is made larger than a refractive index of a non-crystallized part. In case of the irradiation, the beam 4 is controlled so that a temperature of the layer 1 is <=240 deg.C. In this way, it is possible to obtain an optical waveguide which is excellent in its boundary surface accuracy, small in its light scattering loss, and does not peel off by a mechanical vibration, etc. |
