发明名称 WIRE BONDING METHOD
摘要 PURPOSE:To shorten a bonding time, by operating and integrating electric power based on the level of oscillating voltage and the level of oscillating current which are generated in an exciting power source, and stopping the oscillation of an ultrasonic wave when the integrated value reaches predetermined electric energy. CONSTITUTION:In this device, the following parts are provided; a bonding tool 1; a piezoelectric element 2; an output transformer 3 which is an exciting power source for the piezoelectric element; a low-value resistor 4; an ultrasonic wave oscillator 5; an oscillating time control circuit 6; and a controller part 7. Furthermore, the following parts are provided: an oscillating voltage detecting means 8 for detecting the level of oscillating voltage; an oscillating current detecting means 9 which detects the level of the oscillating current; and an electric energy operating means 10 which operates electric energy. The means 10 actuates the oscillating time control circuit 6 when the electric energy reaches preset electric energy. Then, the Ievel of the oscillating voltage and the level of the oscillating current which are generated in the oscillating power source 3 in bonding are used and electric power is operated and integrated. When said integrated value reaches the predetermined electric energy, the oscillation of an ultrasonic wave is stopped. In this method, the bonding time can be shortened, and the productivity is improved.
申请公布号 JPH01283940(A) 申请公布日期 1989.11.15
申请号 JP19880115244 申请日期 1988.05.11
申请人 发明人
分类号 H01L21/607;H01L21/60 主分类号 H01L21/607
代理机构 代理人
主权项
地址
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