| 摘要 |
<p>The present invention provides an image processing apparatus for inspecting defects of enclosure of semiconductor devices, comprising first histogram memory means (60R) for storing a relative density degree of a first image signal or a reference signal, second histogram memory means (60P) for storing a relative density degree of a second image signal of an object to be inspected, third histogram memory means (70R) for storing an accumulated value of the relative degree supplied from the first histogram memory (60R), fourth histogram memory means (70P) for storing an accumulated value of the relative degree supplied from the second histogram memory (60P), and coincidence degree detection means (80) for detecting the coincidence degree between data from the third histogram memory means (70R) and the fourth histogram memory means (70P).</p> |
