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发明名称
SEMICONDUCTEUR INTEGRATED CIRCUIT DEVICE HAVING A TESTER CIRCUIT
摘要
申请公布号
EP0252714(A3)
申请公布日期
1989.11.15
申请号
EP19870305985
申请日期
1987.07.07
申请人
FUJITSU LIMITED
发明人
MITONO, YOSHIHARU
分类号
H01L21/66;G01R31/28;G01R31/319;G06F11/22;H01L21/822;H01L27/04;(IPC1-7):G01R31/28
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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